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AXCELIS TECHNOLOGIES INC — Investor Relations & Filings

Ticker · ACLS ISIN · US0545402085 LEI · 529900HF9B6NL1QG9F05 US Manufacturing
Filings indexed 1,064 across all filing types
Latest filing 2026-05-08 Interim / Quarterly Rep…
Country US United States of America
Listing US ACLS

About AXCELIS TECHNOLOGIES INC

https://www.axcelis.com/

Axcelis Technologies, Inc. is a provider of equipment and services to the semiconductor manufacturing industry. The company specializes in the design, manufacture, and servicing of ion implantation systems, which are a critical technology in the semiconductor fabrication process. Its primary product portfolio is built on the Purion platform, a suite of ion implanters that includes high-current, medium-current, and high-energy models. These systems are engineered to deliver high levels of precision, purity, and productivity for a wide range of applications, enabling semiconductor manufacturers to address complex fabrication challenges while managing cost of ownership.

Recent filings

Filing Released Lang Actions
10-Q - AXCELIS TECHNOLOGIES INC (0001113232) (Filer)
Interim / Quarterly Report
2026-05-08 English
8-K - AXCELIS TECHNOLOGIES INC (0001113232) (Filer)
Regulatory Filings
2026-05-06 English
ARS - AXCELIS TECHNOLOGIES INC (0001113232) (Filer)
Annual Report
2026-03-31 English
DEF 14A - AXCELIS TECHNOLOGIES INC (0001113232) (Filer)
Proxy Solicitation & Information Statement
2026-03-31 English
SCHEDULE 13G/A - AXCELIS TECHNOLOGIES INC (0001113232) (Subject)
Major Shareholding Notification
2026-03-26 English
3 - AXCELIS TECHNOLOGIES INC (0001113232) (Issuer)
Director's Dealing
2026-03-25 English

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