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VPEC Regulatory Filings 2016

Jul 5, 2016

52095_rns_2016-07-05_e4db88ab-c737-42ca-b064-b6652a740215.pdf

Regulatory Filings

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Period
Column II
III
IV
V
VI
2
Be
Beryllium
B
Boron
C
Carbon
N
Nitrogen
O
Oxygen
3
Mg
Magnesium
Al
Aluminum
Si
Silicon
P
Phosphorus
S
Sulfur
4
Zn
Zinc
Ga
Gallium
Ge
Germanium
As
Arsenic
Se
Selenium
5
Cd
Cadmium
In
Indium
Sn
Tin
Sb
Antimony
Te
Tellurium
6
Hg
~~Mercury~~
Tl
~~Thallium~~
Pb
~~Lead~~
二元化合物Binary : GaAs, InP, GaP,GaN, etc.
元化合物Ternary : InGaAs, InGaP, AlGaAs, etc.
元化合物Quaternary : AlGaInP, InGaAsP, etc.
元化合物Pentanary : AlGaInAsN, etc.
��
GaAs, InP, GaN, GaP, GaSb...
Element Si �Ge
Compound
III-V
IV-IV
II-VI
SiC, SiGe
ZnSe, ZnS, CdS, etc.

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:

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MO Source + Hydride + Carrier Gas � H2

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AsH3 : Arsine PH3 : Phosphine SiH 4 : Silane Si H 2 6 : Disiline H2Se : Hydrogen Selenide CBr 4 : Carbon Tetrabromide

TEAl : Tri-ethyl-Aluminum ( C2H5 )3Al TMGa : Tri-Methyl-Gallium ( CH3 )3 Ga SiH TMIn : Tri-Methyl-Indium ( CH3 )3In Si H 2 DETe : Di-ethyl-Tellurium ( C2H5 )2Te DEZn : Di-ethyl-Zinc ( C2H5 )2Zn CBr CP2Mg : Bis (cyclo-penta-dienyl ) Magnesium ��

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CH Al CH TMAl Tri - Methyl - Aluminum ( CH3 )3Al 3 3 � � � CH 3

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�� 高電子移動速率 �� 高頻率響 �� 高線 �� 高功率 �� 、光、光 �� 太

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� ��

4~6 ”GaAs Substrate

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GaAs Epi- Wafer ��

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MOCVD Reactor

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