VPEC — Investor Presentation 2022

May 13, 2022

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公司簡介 MOCVD 創造世界級之競爭力

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心 核 技術

MOCVD （有機金屬氣相沉積法）

• Metal Organic Chemical Vapor Deposition

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核心技術

生產 MOCVD 有機金屬化學氣相沉積法 機台 Metal Organic Chemical Vapor Deposition 透過有機金屬化學氣相沉積法，在基板上生 生產 長半導體薄膜的方式，同時透過機台即時監 、 、 方式 控，精確控制磊晶層，完成砷化鎵 磷化銦 氮化鎵等不同產品磊晶片生產。

生產
原理

磊晶層是由 MOCVD 在腔體中加熱基板，一 個原子層，層層堆疊，行成磊晶層。

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半導體分類 （ 依使用材料 ）

Element Si Ge ,

Semiconductor

Compound

IV-IV SiC, SiGe

III-V

GaAs, InP, GaN, GaP, GaSb...

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||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
|II-VI|
|ZnSe,|ZnS, CdS, etc.|
|P erio d|C o lu m n II|III|IV|V|V I|
|B e|鈹|B|硼|C|碳|N|氮|O|氧|
|2|
|B e r|y lliu m|B o ro n|C a rb o n|N itro g|e n|O x y|g|e n|二元化合物|Binary : GaAs, InP, GaP,GaN, etc.|
|M|g|鎂|A l|鋁|S i|矽|P|磷|S|硫|
|3|M|a g ne s iu m|A lu m in u m|S ilic o n|P ho s|p ho rus|S u lfu r|三元化合物|Ternary : InGaAs, InGaP, AlGaAs, etc.|
|4|Z n|鋅|G a|鎵|G e|鍺|A s|砷|S e|硒|四元化合物|Quaternary : AlGaInP, InGaAsP, etc.|
|Z inc|G a lliu m|G e rm a n iu m|A rse n ic|S e le n iu m|
|C d|鎘|In|銦|S n|錫|S b|銻|Te|碲|五元化合物|Pentanary : AlGaInAsN, etc.|
|5|
|C a d m iu m|Ind iu m|T in|A ntim o n y|Te lluriu m|
|H g|汞|T l|鉈|P b|鉛|
|6|
|M|e rc u r|y|T ha lliu m|L e a d|
|4|

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磊晶過程中之化學反應

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化學反應式：

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主要原物料 :

MO Source + Hydride + Carrier Gas ： H2

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AsH : Arsine 3 PH3 : Phosphine SiH : Silane 4 Si H : Disiline 2 6 H2Se : Hydrogen Selenide CBr : Carbon Tetrabromide 4

TEAl : Tri-ethyl-Aluminum ( C2H5 )3Al TMGa : Tri-Methyl-Gallium ( CH3 )3 Ga TMIn : Tri-Methyl-Indium ( CH3 )3In DETe : Di-ethyl-Tellurium ( C2H5 )2Te DEZn : Di-ethyl-Zinc ( C2H5 )2Zn

CP2Mg : Bis (cyclo-penta-dienyl ) Magnesium 環戊二烯鎂

CH Al CH TMAl Tri - Methyl - Aluminum ( CH3 )3Al 3 3 三 甲基 鋁 CH 3

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化合物半導體材料特性

1. High Electron Mobility 高電子移動速率 (5.7x higher than CM0S)

2. High Frequency Response 高頻率響應

3. Wide Band Width 寬幅之頻寬

4. High Linearity 高線性度

5. High Power 高功率

6. Alternative Choice of Material 材料選擇多元性

7. 抗輻射

適用於無線通訊、光通訊、雷射

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產業供應鏈

IDM ： Qorvo, Avago, Skyworks

Sumitomo, Freiberg, AXT

2~6 ”GaAs Substrate

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GaAs Epi- Wafer Microelectronics 磊晶片 IC Process Substrate

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Foundry ： WIN, AWSC, GCS

MOCVD Reactor

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Wireless Communication

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2019 年 -2022 年 Q1 損益情形

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2022 微電子產品 Outlook

5G Mobile Penetration WiFi6 / 6E

IoT Smart Link

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Micro
Electron
ics
V2X PA LEO Satellite 5G Base Station Military
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2022 光電子產品 Outlook

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Car LiDAR AR / VR Sensing
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Opto
electron
ics
Robot Vacuum Sense Special Heat/IR Imaging
CCD SWIR
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AR / VR

~~Detector: PD~~

Wireless

LiDAR Turnkey Solution

~~Detector: PD, APD~~

V2X

VPEC Proprietary and Confidential

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THE ~~WALL STREET JOURNAL~~

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