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Media | 20 January 2015 08:00
SUSS MicroTec and NuFlare Technology agree on collaboration
(DGAP-Media / 2015-01-20 / 08:00)
PRESS RELEASE
SUSS MicroTec and NuFlare Technology agree on collaboration
Yokohama, JAPAN and Garching, GERMANY, January 20th, 2015 – NuFlare Technology, the market leader in electron-beam mask writers and SUSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets, announced today a cooperation to combine their expertise in Photomask Equipment and process solutions. NuFlare Technology will install a SUSS MicroTec MaskTrack Pro bake and develop system into their main manufacturing fab, in Yokohama, Japan, in early 2015. The MaskTrack Pro system is designed and manufactured to meet the most demanding requirements for masks used in NGL (Next Generation Lithography), such as EUVL (Extreme-Ultraviolet Lithography), 193i extension and NIL (Nano-Imprint Lithography). Since its release by SUSS MicroTec in 2010, more than 30 systems have been shipped to customers worldwide. NuFlare Technology and SUSS MicroTec will jointly work on advanced process solutions, closely integrating the latest NuFlare EB-writer, EBM-9000 and MaskTrack Pro .
‘In the semiconductor industry, equipment suppliers are responsible for a smooth and fast start-up of their systems into production.’, says Yuta Nagai, General Manager of SUSS MicroTec Photomask Equipment. ‘Our valuable partnership with NuFlare allows both companies to provide solid turn-key equipment and technology solutions to mask makers worldwide.’
‘Integration between mask writer and develop system is indispensable to accommodate a tighter accuracy request from our high-end customers. I believe the collaboration between SUSS MicroTec and NuFlare will allow us to give them the solution.’, says Fumiaki Shigemitsu, President of NuFlare Technology, Inc.
About NuFlare Technology, Inc.
NuFlare Technology, Inc. was founded in 2002 as a spinoff of the Semiconductor Equipment Business Division of Toshiba Machine Co., Ltd. Since then, NuFlare has been active in the development, manufacture, and sale of electron beam mask writers, mask inspection systems, and epitaxial growth systems, all devices essential in the drive toward shrinking physical dimensions and growing sophistication of semiconductor devices. For more information, please visit http://www.nuflare.co.jp/english/
Contact:
Hirohito Anze, NuFlare Technology, Inc
+81-45-370-9244
About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS MicroTec supports more than 8.000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany. For more information, please visit http://www.suss.com .
Contact:
Franka Schielke, SÜSS MicroTec AG
+49 89 32007 161
Contact:
SUSS MicroTec AG
Franka Schielke
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451
Email: [email protected]
End of Media Release
Issuer: SÜSS MicroTec AG
Key word(s): Research/Technology
2015-01-20 Dissemination of a Press Release, transmitted by DGAP – a service of EQS Group AG.
The issuer is solely responsible for the content of this announcement.
The DGAP Distribution Services include Regulatory Announcements, Financial/Corporate News and Press Releases.
Media archive at www.dgap-medientreff.de and www.dgap.de
| Language: | English |
| Company: | SÜSS MicroTec AG |
| Schleissheimer Strasse 90 | |
| 85748 Garching | |
| Germany | |
| Phone: | +49 (0)89 32007-161 |
| Fax: | +49 (0)89 32007-451 |
| E-mail: | [email protected] |
| Internet: | www.suss.com |
| ISIN: | DE000A1K0235 |
| WKN: | A1K023 |
| Listed: | Regulierter Markt in Frankfurt (Prime Standard); Freiverkehr in Berlin, Düsseldorf, Hamburg, München, Stuttgart |
| End of News | DGAP-Media |
| - - - |
| 313061 2015-01-20 |
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