SÜSS MicroTec SE

Investor Presentation • Jan 23, 2013

SUSS MICROTEC INVESTOR PRESENTATION

January 2013

This presentation contains forward-looking statements relating to the business, financial performance and earnings of SUSS MicroTec AG and its subsidiaries and associates. Forward-looking statements are based on current plans, estimates, projections and expectations and are therefore subject to risks and uncertainties, most of which are difficult to estimate and which in general are beyond the control of SUSS MicroTec AG. Consequently, actual developments as well as actual earnings and performance may differ materially from those which explicitly or implicitly assumed in the forwardlooking statements. SUSS MicroTec AG does not intend or accept any obligation to publish updates of these forward-looking statements.

TABLE OF CONTENT

I. SUSS MicroTec at a Glance

• II. Products and Markets
• III. Growth Opportunities
• IV. Enhancement of Lithography Portfolio
• V. Financials
• VI. Outlook

SUSS MICROTEC AT A GLANCE

• SUSS MicroTec: A global leader in semiconductor equipment
• Our equipment and process solutions create the micro structures that build and connect micro electronic devices

• We are focused on high growth market segments: Semiconductors, MEMS, LEDs

• Key Data:

• Stock Exchange Symbol: SMHN
• TecDAX
• Share price*: 8.44 €
• Market Cap*: 161 € million
• Net Cash, September 2012: 30.7 € million

* December 31, 2012

EXTENSIVE PRODUCT PORTFOLIO

Photomask Equipment

Coater/Developer

Wafer Bonders

Alignment Verification Systems

SUSS MICROTEC – A GLOBAL PLAYER

MAIN PRODUCTION SITES

Germany

Garching

• SUSS MicroTec HQ
• Development/production:
• Mask Aligner
• Bond Aligner
• Core competencies:
• Exposure (proximity exposure)
• Alignment

Sternenfels

• Development/production :
• Bonder
• Coater and Developer
• Photomask Equipment
• Core competencies:
• Wet processing
• Wafer bonding

USA

Corona

• Development/production:
• Stepper/Scanner
• Laser Processing
• Core competencies:
• Exposure (UV projection lithography)
• Laser Ablation

SALES BY SEGMENT AND REGION 9M 2012

TABLE OF CONTENT

• I. SUSS MicroTec at a Glance
• II. Products and Markets
• III. Growth Opportunities
• IV. Enhancement of Lithography Portfolio
• V. Financials
• VI. Outlook

SUSS MICROTEC IN THE VALUE CHAIN

• Key player in providing state-of-the-art semiconductor manufacturing equipment
• Development of highly innovative process solutions with industry and R&D partners
• Components for electronic devices like cell phones, PCs and tablet computers are produced on SUSS MicroTec"s equipment

THE SEMICONDUCTOR MARKET

KEY MARKETS

SEGMENTS AND PRODUCTS

13 SUSS MicroTec Investor Presentation

SEGMENTS AND MARKETS

• I. SUSS MicroTec at a Glance
• II. Products and Markets
• III. Growth Opportunities
• IV. Enhancement of Lithography Portfolio
• V. Financials
• VI. Outlook

MEGA TRENDS DRIVING THE INDUSTRY

• Global mega-trends drive the microelectronics industry and create long term opportunities
• Digital Lifestyle
• E-Mobility
• Energy efficiency
• Micro chips, MEMS und LEDs are the building blocks for the technological product advancement
• SUSS MicroTec"s focus is to offer development and manufacturing solutions for these components in markets that have a sustainable long term growth perspective

Digital lifestyle

E-mobility

Energy efficiency

SCALING TECHNOLOGIES

• Technical challenges and limitations make it increasingly more difficult and expensive to reduce the feature size of integrated circuits (shrinking)

• Complementary technologies like Wafer Level Packaging (WLP) and 3 Dimensional Chip Stacking (3DIC) circumvent the deficiencies of traditional scaling and allow increasing density and functionality at lower cost

• This extension beyond the conventional shrink roadmap is called "More than Moore"

• Packaging becomes the key enabler for scaling
• Manufacturing value is shifting from silicon to the package

SUSS MicroTec is one of the few companies offering a comprehensive equipment and process solution spectrum for WLP and 3DIC

With its strong position in the fast growing target markets 3D Integration / Advanced Packaging, LED and MEMS, SUSS MicroTec can benefit from the expected market developments:

Advanced Packaging (wafer level packaging and flip chip)

remains more robust than the overall market, primarily driven by smart phones and tablets

3D TSV

expected to transition to production volume in the years to come

Compound Semi (LED, MEMS, RF, Optoelectronics, III-V Power)

expected to remain robust based on smartphone and tablet growth and will drive further demand for advanced packaging solutions

Segment growth 2011 - 2016E CAGR ~ 15% (Gartner and industry estimates)

Future semiconductor device generations rely on continuous scaling

SUSS MicroTec"s equipment and process solutions enable

• 2-dimensional shrinking ("Moore's Law") and

• 3-dimensional stacking of integrated circuits ("More than Moore")

• I. SUSS MicroTec at a Glance

• II. Products and Markets
• III. Growth Opportunities

IV. Enhancement of Lithography Portfolio

• V. Financials
• VI. Outlook

TAMARACK SCIENTIFIC AT A GLANCE

• Tamarack Scientific develops and builds UV projection lithography systems and laser micro-structuring tools
• Tamarack targets the same high growth market segments as SUSS MicroTec: Advanced Packaging, 3D Integration, MEMS and LED

Key Data:

• Founded 1966, based in Corona, California
• Installed base larger than 1,100 systems
• Revenues FY11/12: app. 10 million €
• 63 employees
• Total purchase price 9.34 million \$ (plus additional variable earn-out component)

Increasing chip performance requires adoption of innovative lithography technologies in the semiconductor backend

Not one technology fits all needs

• Add new and highly complementary product line with the core technologies UV projection lithography and laser micro-structuring
• SUSS MicroTec"s global sales and support structure plus Tamarack"s technology offering enable the expansion of SUSS MicroTec"s lithography footprint
• SUSS MicroTec as a financially strong and globally positioned company can unlock the potential of Tamarack and enable high future growth

EXPOSURE SOLUTIONS

SUSS MicroOptics is leading supplier for advanced micro-optics

• Field of use is among others semiconductor lithography (i.e. Carl Zeiss, SUSS MicroTec), telecommunications and R&D
• Our technology and innovation leadership position is a solid base for continuous future growth
• Over the last 10 years a CAGR of 20% could be achieved
• In November 2012 SUSS MicroOptics moved into a new production facility:
• Class 100/1000 cleanroom (415sqm)
• Total investment of more than 2 € mio
• Production start mid December

• New fab allows to move from one shift (8h/5d) to 24/7 operation

• I. SUSS MicroTec at a Glance

• II. Products and Markets
• III. Growth Opportunities
• IV. Enhancement of Lithography Portfolio

V. Financials

VI. Outlook

15 QUARTERS BUSINESS DEVELOPMENT

EBIT, FREE CASH FLOW AND NET CASH DEVELOPMENT

in € million	Q3 2012	Q3 2011	in %	9M 2012	9M 2011	in %
Order Intake	36.6	38.2	-4.2%	117.0	118.6	-1.3%
Order Backlog (09/30)	--	--	--	102.4	103.5	-1.1%
Revenue	40.7	45.9	-11.3%	108.2	130.6	-17.2%
EBIT	1.6	4.1	-61.0%	3.1	14.7	-78.9%
EBIT in % of Sales	3.9%	8.9%	--	2.9%	11.3%	--
Earnings after tax (cont. operations)	0.4	2.9	-86.2%	0.8	11.2	-92.9%
Earnings after tax	0.4	2.9	-86.2%	2.3	11.2	-79.5%
EPS in € (basic)	0.02	0.15	-86.7%	0.12	0.59	-79.7%
Free Cash Flow*	0.9	4.5	-80.0%	-6.2	2.0	<-100%
Net Cash**	--	--	--	30.7	40.1	-23.4%
Employees (09/30)	--	--	--	699	637	+9.7%

* before consideration of purchased interest-bearing securities and M&A activities

** incl. stock of interest-bearing securities

• I. SUSS MicroTec at a Glance
• II. Products and Markets
• III. Growth Opportunities
• IV. Enhancement of Lithography Portfolio
• V. Financials
• VI. Outlook

GUIDANCE AND INVESTMENT CASE

Guidance	FY 2012:   Q4 2012:	- Sales between 160 and 170 € million - EBIT between 5 and 10 € million - Order Intake 25 – 40 € million
Investment Case	 Strong fundamental growth in target markets Strong competitive positioning:  first or second in the target markets  Leading equipment company in the semiconductor backend, enabling "Moore"s Law" as well as "More than Moore"  Significant mid term revenue opportunity  Play active role in the consolidation of the backend

SÜSS MicroTec AG Schleissheimer Str. 90 85748 Garching

www.suss.com

Franka Schielke

Tel.: +49 (0) 89-32007- 161 Fax.: +49 (0) 89-32007- 451 Email: franka.schielke@suss.com

SÜSS MicroTec AG Schleissheimer Strasse 90 85748 Garching (Munich) Germany www.suss.com

Contact Financial Calendar 2013

Cheuvreux German Corporate Conference, Frankfurt/Main	21. Jan.
Annual Report 2012	28. Mar
Quarterly Report 2013	8. May
Commerzbank German Midcap Conference, Boston/New York	22./23. May
Shareholders" Meeting, Haus der Bayerischen Wirtschaft, Munich	19. Jun.
Interim Report 2013	8. Aug.
Commerzbank TMT Conference, Frankfurt	28. Aug
UBS Best of Germany Conference, New York	16. - 18. Sep
UniCredit/Kepler Investment Conference, Munich	24. - 26. Sep
Baader Investment Conference, Munich	24. - 26. Sep
Nine-month Report 2013	7. Nov.
German Equity Forum, Frankfurt/Main	11. - 13. Nov

SUSS MICROTEC SHARE PRICE DEVELOPMENT

(Price of the SUSS MicroTec Share at December 30, 2011, € 5.63)

SÜ SS M icroTec, indexed TecD A X , indexed Prime IG Semiconduct or, indexed

Average daily trading volume 2012: ~ 116,000