SÜSS MicroTec SE

Investor Presentation • Mar 5, 2013

SUSS MICROTEC INVESTOR PRESENTATION

March 2013

This presentation contains forward-looking statements relating to the business, financial performance and earnings of SUSS MicroTec AG and its subsidiaries and associates. Forward-looking statements are based on current plans, estimates, projections and expectations and are therefore subject to risks and uncertainties, most of which are difficult to estimate and which in general are beyond the control of SUSS MicroTec AG. Consequently, actual developments as well as actual earnings and performance may differ materially from those which explicitly or implicitly assumed in the forwardlooking statements. SUSS MicroTec AG does not intend or accept any obligation to publish updates of these forward-looking statements.

TABLE OF CONTENT

I. SUSS MicroTec at a Glance

• II. Products and Markets
• III. Growth Opportunities
• IV. Enhancement of Lithography Portfolio
• V. Financials
• VI. Outlook

SUSS MICROTEC AT A GLANCE

• SUSS MicroTec: A global leader in semiconductor equipment
• Our equipment and process solutions create the micro structures that build and connect micro electronic devices
• We are focused on high growth market segments: Semiconductors, MEMS, LEDs

Key Data:

• Stock Exchange Symbol: SMHN
• TecDAX
• Share price*: 9.12 €
• Market Cap*: 174 € million
• Net Cash, December 2012: 32.3 € million

* January 31, 2013

EXTENSIVE PRODUCT PORTFOLIO

Photomask Equipment

Coater/Developer

Wafer Bonders

Alignment Verification Systems

SUSS MICROTEC – A GLOBAL PLAYER

MAIN PRODUCTION SITES

Germany

Garching

• SUSS MicroTec HQ
• Development/production:
• Mask Aligner
• Bond Aligner
• Core competencies:
• Exposure (proximity exposure)
• Alignment

Sternenfels

• Development/production :
• Bonder
• Coater and Developer
• Photomask Equipment
• Core competencies:
• Wet processing
• Wafer bonding

USA

Corona

• Development/production:
• Stepper/Scanner
• Laser Processing
• Core competencies:
• Exposure (UV projection lithography)
• Laser Ablation

in € million	2012	2011	YoY in %
Revenue	163.8	175.4	-6.6%
Order Intake	157.2	143.1	9.9%
Order Backlog 12/31	86.5	83.7	3.3%
EBIT	11.7	18.6	-37.1%

*Based on preliminary numbers ** Based on 9m figures

8 SUSS MicroTec Investor Presentation

TABLE OF CONTENT

• I. SUSS MicroTec at a Glance
• II. Products and Markets
• III. Growth Opportunities
• IV. Enhancement of Lithography Portfolio
• V. Financials
• VI. Outlook

SUSS MICROTEC IN THE VALUE CHAIN

• Key player in providing state-of-the-art semiconductor manufacturing equipment
• Development of highly innovative process solutions with industry and R&D partners
• Components for electronic devices like cell phones, PCs and tablet computers are produced on SUSS MicroTec"s equipment

THE SEMICONDUCTOR MARKET

KEY MARKETS

SEGMENTS AND MARKETS

• I. SUSS MicroTec at a Glance
• II. Products and Markets
• III. Growth Opportunities
• IV. Enhancement of Lithography Portfolio
• V. Financials
• VI. Outlook

MICROCHIPS, MEMS UND LED: BUILDING BLOCKS FOR TECHNOLOGICAL PRODUCT ADVANCEMENT

Digital Lifestyle	- The "Digital Lifestyle" is characterized by permanent internet connectivity and convergence of media - Mobile devices like smartphones and tablet PCs provide this capability at affordable cost - New device generations offer higher functionality
E-Mobility	- Alternative transportation / mobility solutions are getting more traction with attractive price / performance ratios - Evs, Hybrid-Cars, Segways, E-Bikes, but also trains drive the need for power devices but also high performance ICs
Energy Efficiency	- Increase environmental awareness and rising energy prices and fuel the demand for energy efficient solutions in electricity usage i.e. lighting - Energy efficiency in industrial production - Smart energy management in household applications safes energy

With its strong position in the fast growing target markets 3D Integration / Advanced Packaging, LED and MEMS, SUSS MicroTec can benefit from the market developments:

Advanced Packaging	Wafer level packaging and flip chip is expected to remain more robust than the overall market, primarily driven by mobile devices like smart phones and tablets
3D Trough Silicon Vias (TSV)	Transition to production volume in the years to come
Compound Semiconductors	LED, MEMS, RF, Optoelectronics, III-V Power are expected to remain robust based on smartphone and tablet growth and will drive further demand for advanced packaging solutions

Segment growth 2011 - 2016E CAGR ~ 15% (Gartner and industry estimates)

SCALING TECHNOLOGIES FROM 2D TO 3D

2D Packaging	2.5D Packaging	3D Integration
- Increased performance and complexity of ICs by shrinking transistor geometry according	- Combining of several (and heterogeneous) semiconductor components on an interposer	- The extension beyond the conventional shrink roadmap is called "More than Moore"
to Moore"s Law - New technologies like EUV	addresses limitations of traditional shrinking	- Packaging becomes key enabler for scaling and some
and multiple pattering allow further scaling	- Increased packaging density - Reduced footprint - Complementary technology to Moore"s Law	manufacturing value is shifting from silicon to the package
- Technical challenges and limitations make it increasingly more difficult and expensive to		- Performance and complexity increase combined with smaller footprint
reduce the feature size		- Reduced energy consumption

SUSS MicroTec's equipment and process solutions enable 2D shrinking ("Moore's Law") and 3D stacking ("More than Moore")

• I. SUSS MicroTec at a Glance
• II. Products and Markets
• III. Growth Opportunities

IV. Enhancement of Lithography Portfolio

• V. Financials
• VI. Outlook

TAMARACK SCIENTIFIC AT A GLANCE

• Tamarack Scientific develops and builds UV projection lithography systems and laser micro-structuring tools
• Tamarack targets the same high growth market segments as SUSS MicroTec: Advanced Packaging, 3D Integration, MEMS and LED

Key Data:

• Founded 1966, based in Corona, California
• Installed base larger than 1,100 systems
• Revenues FY11/12: app. 10 million €
• 63 employees
• Total purchase price 9.34 million \$ (plus additional variable earn-out component)

Increasing chip performance requires adoption of innovative lithography technologies in the semiconductor backend

Not one technology fits all needs

• Add new and highly complementary product line with the core technologies UV projection lithography and laser micro-structuring
• SUSS MicroTec"s global sales and support structure plus Tamarack"s technology offering enable the expansion of SUSS MicroTec"s lithography footprint
• SUSS MicroTec as a financially strong and globally positioned company can unlock the potential of Tamarack and enable high future growth

SUSS MICROTEC LITHOGRAPHY PORTFOLIO

Our Lithography Solutions

• Established: Proximity Exposure Systems

• NanoImprint

• Evolution: Innovative UV Lithography Alternatives:

• Full field projection scanner
• Projection stepper
• Revolution: Laser Patterning

SUSS MicroTec to become the leading provider for mid- and backend lithography systems

EXPOSURE SOLUTIONS

• Micro-optical arrays are important optical elements to enhance the performance of lithography solutions • For SUSS MicroTec this is a key competence
• Our innovation and technology leadership position is a solid base for continuous future growth • Over the last 10 years a CAGR of 20% could be achieved

A new production facility increases capacity to meet market demand:

• Class 100/1000 cleanroom (415sqm)
• Total investment of more than € 2 million
• Production start mid December 2013

• New fab allows to move from one shift (8h/5d) to 24/7 operation

• I. SUSS MicroTec at a Glance

• II. Products and Markets
• III. Growth Opportunities
• IV. Enhancement of Lithography Portfolio

V. Financials

VI. Outlook

LONG TERM BUSINESS DEVELOPMENT

EBIT, FREE CASH FLOW AND NET CASH DEVELOPMENT

in € million	2012	2011	YoY in %
Revenue	163.8	175.4	-6.6%
Order Intake	157.2	143.1	9.9%
Order Backlog 12/31	86.5	83.7	3.3%
EBIT	11.7	18.6	-37.1%
EBIT in % of Sales	7.1%	10.6%	-3.5%pt.
Net Cash*	32.3	42.0	-23.1%
Free Cash Flow**	-4.5	3.5	<-100%

*incl. stock of interest-bearing securities

**before consideration of purchased interest-bearing securities and M&A activities

• I. SUSS MicroTec at a Glance
• II. Products and Markets
• III. Growth Opportunities
• IV. Enhancement of Lithography Portfolio
• V. Financials
• VI. Outlook

GUIDANCE AND INVESTMENT CASE

Guidance Investment Case Strong fundamental growth in target markets Strong competitive positioning: first or second in the target markets Leading equipment company in the semiconductor backend, enabling "Moore"s Law" as well as "More than Moore" Significant mid term revenue opportunity FY 2013: - Sales of approximately 150 € million - EBIT: low single digit € million amount

Play active role in the consolidation of the backend

SÜSS MicroTec AG Schleissheimer Str. 90 85748 Garching

www.suss.com

Franka Schielke

Tel.: +49 (0) 89-32007- 161 Fax.: +49 (0) 89-32007- 451 Email: franka.schielke@suss.com

SÜSS MicroTec AG Schleissheimer Strasse 90 85748 Garching (Munich) Germany www.suss.com

Contact Financial Calendar 2013

Cheuvreux German Corporate Conference, Frankfurt/Main	21. Jan.
Annual Report 2012	28. Mar
Quarterly Report 2013	8. May
Commerzbank German Midcap Conference, Boston/New York	22./23. May
Shareholders" Meeting, Haus der Bayerischen Wirtschaft, Munich	19. Jun.
Interim Report 2013	8. Aug.
Commerzbank TMT Conference, Frankfurt	28. Aug
UBS Best of Germany Conference, New York	16. - 18. Sep
UniCredit/Kepler Investment Conference, Munich	24. - 26. Sep
Baader Investment Conference, Munich	24. - 26. Sep
Nine-month Report 2013	7. Nov.
German Equity Forum, Frankfurt/Main	11. - 13. Nov

SUSS MICROTEC SHARE PRICE DEVELOPMENT

(Price of the SUSS MicroTec Share at December 30, 2011, € 5.63)

Major Shareholders: DWS Germany 8.68% Credit Suisse Switzerland 3.35% BlackRock 3,23% Henderson Global Invest. 3.14% DWS Luxembourg 3.04%

Average daily trading volume 2012/13: ~ 118,000

OVERVIEW SUSS MICROTEC LITHOGRAPHY TECHNOLOGIES – EXPOSURE

OVERVIEW SUSS MICROTEC LITHOGRAPHY TECHNOLOGIES – LASER PATTERING