ONTO INNOVATION INC. — Director's Dealing 2014

Jan 10, 2014

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: NANOMETRICS INC (NANO)
CIK: 0000704532
Period of Report: 2014-01-09

Reporting Person: BENTLEY J THOMAS (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2014-01-09	Common Stock	M	834	$1.20	Acquired	28244	Direct
2014-01-09	Common Stock	M	834	$2.71	Acquired	27410	Direct
2014-01-09	Common Stock	M	834	$6.65	Acquired	26576	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2014-01-09	Non-Qualified Stock Option (right to buy)	$1.20	M	834	Disposed	2014-03-31	Common Stock (834)	Direct
2014-01-09	Non-Qualified Stock Option (right to buy)	$2.71	M	834	Disposed	2014-06-30	Common Stock (834)	Direct
2014-01-09	Non-Qualified Stock Option (right to buy)	$6.65	M	834	Disposed	2014-09-29	Common Stock (834)	Direct

Footnotes

F1: Fully vested.