ONTO INNOVATION INC. — Director's Dealing 2013

May 6, 2013

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: NANOMETRICS INC (NANO)
CIK: 0000704532
Period of Report: 2013-05-03

Reporting Person: Coates Norman V (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2013-05-03	Common Stock	S	21332	$14.18	Disposed	7426	Indirect
2013-05-06	Common Stock	S	1604	$14.07	Disposed	5822	Indirect

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	2111	Direct

Footnotes

F1: The price in Column 4 is a weighted average sale price. The prices actually received ranged from $14.10 to $14.24. The reporting person will provide to the issuer, any security holder of the issuer, or the SEC staff, upon request, information regarding the number of shares sold at each price within the range.

F2: Shares held of record by the Vincent J. Coates Separate Property Trust, U/D/T dated August 7, 1981, for which Norman Coates and Stella Coates act as co-trustees.