ONTO INNOVATION INC. — Director's Dealing 2012

Nov 20, 2012

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: NANOMETRICS INC (NANO)
CIK: 0000704532
Period of Report: 2012-11-20

Reporting Person: OLDHAM WILLIAM G (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2012-11-20	Common Stock	M	834	$7.28	Acquired	12760	Direct
2012-11-20	Common Stock	M	834	$5.76	Acquired	13594	Direct
2012-11-20	Common Stock	M	834	$2.11	Acquired	14428	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2012-11-20	Non-Qualified Stock Option (right to buy)	$7.28	M	834	Disposed	2013-04-01	Common Stock (834)	Direct
2012-11-20	Non-Qualified Stock Option (right to buy)	$5.76	M	834	Disposed	2013-07-01	Common Stock (834)	Direct
2012-11-20	Non-Qualified Stock Option (right to buy)	$2.11	M	834	Disposed	2013-09-30	Common Stock (834)	Direct

Footnotes

F1: Fully vested.