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ONTO INNOVATION INC. Director's Dealing 2011

Mar 16, 2011

30874_dirs_2011-03-16_b781ca98-f737-4510-a436-c740f949f713.zip

Director's Dealing

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SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: NANOMETRICS INC (NANO)
CIK: 0000704532
Period of Report: 2011-03-14

Reporting Person: KISLING RONALD W (Chief Financial Officer)

Non-Derivative Transactions

Date Security Code Shares Price A/D Holdings After Ownership
2011-03-14 Common Stock A 10000 Acquired 10000 Direct

Derivative Transactions

Date Security Exercise Price Code Shares A/D Expiration Underlying Ownership
2011-03-14 Non-Qualified Stock Option (right to buy) $16.16 A 30000 Acquired 2018-03-14 Common Stock (30000) Direct

Footnotes

F1: Shares are represented by restricted stock units. Each restricted stock unit represents a contingent right to receive one share of NANO common stock. The restricted stock units vest on an annual basis, in equal 1/4th increments, over a four-year period from the award date.

F2: The option becomes exercisable over a four-year period from the grant date, with one-fourth of the total number of shares vesting on the first anniversary of the grant date, and 1/48th of the total number of shares vesting ratable on a monthly basis thereafter.