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Nova Ltd. — Regulatory Filings 2006
Feb 23, 2006
6955_rns_2006-02-23_f24bf505-20eb-4f7d-ae9d-b4fdf25387eb.pdf
Regulatory Filings
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Company Contact: Dror David, Chief Financial Officer Nova Measuring Instruments Ltd. Tel: 972-8-938-7505 E-mail: [email protected] http://www.nova.co.il
Investor relations Contacts:
Ehud Helft / Kenny Green GK Investor Relations Tel: +1-866-704-6710 E-mail : [email protected] [email protected]
Nova Introduces the NovaScan® 3090 Integration on Ebara Corporation F-REX300S CMP Polishers
Nova continues the introduction of its NovaScan® 3090 Series for additional semiconductor manufacturing processes and OEM integrations
Rehovot, Israel—February 23, 2006 - Nova Measuring Instruments Ltd. (NASDAQ: NVMI), the market leader in Integrated Metrology (IM) and process control for the semiconductor industry, today announced the introduction of a new integration of its NovaScan 3090 Integrated Metrology system for CMP applications, on Ebara Corporation F-REX300S polishers.
The system is an advanced CMP metrology platform for all process steps such as Poly, STI, Tungsten (W) plugs and Copper interconnect. That includes, among other, oxide residue and Step-height for STI, profiling for Tungsten plugs, and residue detection, erosion and MLT (Metal Line Thickness) for copper interconnect process.
The NovaScan 3090 is based on Nova’s earlier field proven technology platform, the NovaScan 3060 system. NovaScan 3090 is integrated in the exact same configuration as the NovaScan 3060 system, thus offering customers an easy upgrade path. Equipped with a single polarized channel, from Deep-UV to Near-IR, the NovaScan 3090 supports the measurement of solid areas, 2D structures and enables 3D shape characterization. The system provides real-time measurement of thickness and shape of dielectric materials and for a variety of Low-K materials.
Bents Kidron, Nova’s Director of Marketing, stated: “The NovaScan 3090 delivers the measurement capability needed to control high-end 65nm and 45nm CMP applications. The unmatched MAM time of NovaScan 3090, the dynamic precision and tool-to-tool matching, along with built-in high reliability, all offer our customers a production worthy tool covering a wide range of metrology solutions, enabling Wafer-to-Wafer process control, without affecting the process tool's overall throughput.”
About Nova: Nova Measuring Instruments Ltd. develops, designs and produces integrated process control systems in the semiconductor manufacturing industry. Nova provides a broad range of integrated process control solutions that link different semiconductor processes and process equipment. The Company's website is www.nova.co.il
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