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Nova Ltd. — Regulatory Filings 2005
Mar 24, 2005
6955_rns_2005-03-24_5678f6ad-8293-49d3-81b4-6fc217a9ad04.pdf
Regulatory Filings
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Company Contact:
Investor relations Contacts:
Chai Toren, CFO Nova Measuring Instruments Ltd. Tel: 972-8-938-7505 E-mail: [email protected] http://www.nova.co.il
Ehud Helft / Kenny Green Gelbart Kahana Tel: +1-866-704-6710 E-mail : [email protected] [email protected]
Nova Introduces the new NovaScan 3090
Nova Measuring Instruments introduces the NovaScan 3090CD on Lam Research Corporation 2300 Exelan[®] Etch System and the NovaScan 3090SA Standalone System
Rehovoth, Israel --(BUSINESS WIRE)—March 23, 2005 - Nova Measuring Instruments Ltd. (NASDAQ: NVMI), the market leader in integrated measurement and process control for the semiconductor industry, today launched a new series of metrology systems, the NovaScan 3090 series, starting with the introduction of the NovaScan 3090CD that is installed on Lam Research Corporation’s (NASDAQ: LRCX) 2300 Exelan Etch System.
The system forms an advanced metrology platform for Critical Dimension (CD) control and profile measurements, and is designed so that it can operate both as an integrated metrology and stand alone platform for 200mm and 300mm systems, for 65nm IC manufacturing and beyond.
The NovaScan 3090CD is based on Nova’s earlier field proven technology platform, the NovaScan 3060CD system. NovaScan 3090CD is integrated in the exact same configuration as the NovaScan 3060CD system, thus offering customers an easy upgrade path. Equipped with a single polarized channel, from Deep-UV to Near-IR, the NovaScan 3090CD supports the measurement of 2D structures and enables 3D shape characterization. The system provides real-time measurement of CD, trench depth, photoresist height, thickness and shape of complex layer stacks. The reliable single channel system provides the highest throughput of an integrated system in the market, while maintaining the cleanliness and hermetic structure needed to operate in different process conditions. The system demonstrates a 2X performance improvement in metrology capabilities over the NovaScan 3060CD, with enhanced throughput capabilities, while integration and physical layout remain unchanged.
Bents Kidron, Nova’s Director of Marketing states: “The NovaScan 3090CD is the best Integrated Metrology solution for today’s emerging industry requirements, providing optical CD measurements and supporting the emerging trends of 3-Dimensional and ‘in-the-array’ measurements.”
About Nova : Nova Measuring Instruments Ltd. develops, designs and produces integrated process control systems in the semiconductor manufacturing industry. Nova provides a broad range of integrated process control solutions that link different semiconductor processes and process equipment. The Company's website is www.nova.co.il