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Nova Ltd. — Regulatory Filings 2004
Jul 13, 2004
6955_rns_2004-07-13_e62c76f1-9fa0-48fe-94a9-a407a528e0a2.pdf
Regulatory Filings
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Company Contact: Chai Toren, CFO and Vice President Finance Nova Measuring Instruments Ltd. Tel: 972-8-938-7505 E-mail: [email protected] http://www.nova.co.il
Investor relations Contacts: Ehud Helft / Kenny Green Gelbart Kahana Investor Relations Tel: +1-866-704-6710 E-mail: [email protected] [email protected]
Nova Announces Multiple and Repeat Sales of its NovaScan 3060CD system to Key Customers
Rehovoth, Israel, July 13, 2004 - Nova Measuring Instruments, Ltd. (Nasdaq: NVMI), the market leader in integrated measurement and process control for the semiconductor industry, announced that it has received multiple sales orders from a major IC manufacturer in the Asia/Pacific region and repeat orders from a major DRAM manufacturer for its NovaScan 3060CD system. The Scatterometry based tool enables measurement of CD, trench depth, PR height, layer thickness, and other CD related parameters, both for 200mm and 300mm high-end applications.
The NovaScan 3060CD is available both as an integrated or in-line standalone system. Having high throughput measurement capabilities and enabling pre and post measurement, the system facilitates wafer-to-wafer and within wafer controls. Coupled with advanced Closed Loop Control algorithms, the NovaScan 3060CD system provides real-time process monitoring for critical 90nm (and below) processes, such as gate mask opening, EPI layers and dual damascene trenches.
The NovaScan 3060CD Integrated Process Control Tool - the measurement unit is fully integrated within Lam Research Corporation's Exelan 2300 system, utilizing the system's dedicated wafer handling mechanism. The system's patented design includes features such as stationary wafers and an optical window that enables full separation of the measurement unit from corrosive gases that may come from the chamber or the wafer itself. The etch system's controller and it's user interface controls the process monitoring functions of the NovaScan 3060CD system. Data collected in real time is transmitted directly to the tool or uploaded to the factory host computer via a SECS II or HSMS link.
The NovaScan 3060CD In-line Process Control Tool – the standalone configuration is fully compatible with the integrated tool and can be used both as a measurement system and as an engineering station for application development and measurement recipe design. Both 200mm and 300mm versions of this tool have been shipped to customers.
Ronen Frish, Nova's VP Sales & Marketing, commented: "Nova's Optical CD products have successfully penetrated the market both in stand-alone and integrated configurations. Repeat orders for the NovaScan 3060CD from a major semiconductor manufacturer are clear evidence that these systems are strongly supporting growing Automated Process Control (APC) demands and solutions. In the coming years, we expect to see significant sales growth in this market segment. These plans are now well supported by both proven technology and strong IP in the field of Optical CD metrology and associated APC."
About Nova:
Nova Measuring Instruments Ltd. develops, designs and produces integrated process control systems in the semiconductor manufacturing industry. Nova provides a broad range of integrated process control solutions that link different semiconductor processes and process equipment. The Company's website is www.nova.co.il