MKS INC — Director's Dealing 2013

Mar 5, 2013

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: MKS INSTRUMENTS INC (MKSI)
CIK: 0001049502
Period of Report: 2013-03-04

Reporting Person: BERLINGHIERI LEO (Director, CEO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2013-03-04	Common Stock	M	14625	—	Acquired	115288.607	Direct
2013-03-04	Common Stock	M	10834	—	Acquired	126122.607	Direct
2013-03-04	Common Stock	F	12017	$26.96	Disposed	114105.607	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2013-03-04	Restricted Stock Unit	$	M	14625	Disposed		Common Stock (14625)	Direct
2013-03-04	Restricted Stock Unit	$	M	10834	Disposed		Common Stock (10834)	Direct

Footnotes

F1: Each restricted stock unit represents the contingent right to receive one share of common stock of MKS Instruments, Inc.

F2: This transaction was effected pursuant to a Rule 10b5-1 trading plan previously adopted by the reporting person.

F3: These RSUs are subject to the achievement of performance criteria determined in the first year of the grant and thereafter vests in equal annual installments over three years.

F4: The RSUs vest in equal annual installments over three years.