MKS INC — Director's Dealing 2013

Feb 26, 2013

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: MKS INSTRUMENTS INC (MKSI)
CIK: 0001049502
Period of Report: 2013-02-25

Reporting Person: SMITH JOHN ALEXANDER (Sr. VP, ASG)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2013-02-25	Common Stock	M	1401.392	—	Acquired	1401.392	Direct
2013-02-25	Common Stock	M	953	—	Acquired	2354.392	Direct
2013-02-25	Common Stock	F	754	$26.92	Disposed	1600.392	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2013-02-25	Restricted Stock Unit	$	M	1401.392	Disposed		Common Stock (1401.392)	Direct
2013-02-25	Restricted Stock Unit	$	M	953	Disposed		Common Stock (953)	Direct
2013-02-25	Restricted Stock Unit	$	A	1671.62	Acquired		Common Stock (1671.62)	Direct
2013-02-25	Restricted Stock Unit	$	A	2507.429	Acquired		Common Stock (2507.429)	Direct

Footnotes

F1: Each restricted stock unit represents the contingent right to receive one share of common stock of MKS Instruments, Inc.

F2: This transaction was effected pursuant to a Rule 10b5-1 trading plan previously adopted by the reporting person.

F3: These RSUs are subject to the achievement of performance criteria determined in the first year of the grant and thereafter vests in equal annual installments over three years.

F4: The RSUs vest in equal annual installments over three years.