MKS INC — Director's Dealing 2013

Mar 5, 2013

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: MKS INSTRUMENTS INC (MKSI)
CIK: 0001049502
Period of Report: 2013-03-04

Reporting Person: Lee John Tseng-Chung (Sr. VP, HPS, Controls & PFMC)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2013-03-04	Common Stock	M	2813	—	Acquired	7674.47	Direct
2013-03-04	Common Stock	M	2084	—	Acquired	9758.47	Direct
2013-03-04	Common Stock	F	1598	$26.96	Disposed	8160.47	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2013-03-04	Restricted Stock Unit	$	M	2813	Disposed		Common Stock (2813)	Direct
2013-03-04	Restricted Stock Unit	$	M	2084	Disposed		Common Stock (2084)	Direct

Footnotes

F1: Each restricted stock unit represents the contingent right to receive one share of common stock of MKS Instruments, Inc.

F2: This transaction was effected pursuant to a Rule 10b5-1 trading plan previously adopted by the reporting person.

F3: These RSUs are subject to the achievement of performance criteria determined in the first year of the grant and thereafter vests in equal annual installments over three years.

F4: The RSUs vest in equal annual installments over three years.