KLA CORP — Director's Dealing 2011

May 6, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: KLA TENCOR CORP (KLAC)
CIK: 0000319201
Period of Report: 2011-05-05

Reporting Person: Kirloskar Virendra A (SVP & Chief Accounting Officer)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-05-05	Common Stock	M	867	$39.89	Acquired	8106	Direct
2011-05-05	Common Stock	S	3399	$45.00	Disposed	4707	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2011-05-05	Non-Qualified Stock Option (Right to Buy)	$39.89	M	867	Disposed	2014-09-16	Common Stock (867)	Direct

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock - Restricted Stock Units	38150	Direct

Footnotes

F1: These sales were effected pursuant to a Rule 10b5-1 trading plan adopted by the Reporting Person on March 7, 2011.

F2: Each restricted stock unit ("RSU") represents a contingent right to receive one share of KLA-Tencor common stock.

F3: Does not include performance-based RSUs, if any, held by the Reporting Person for which an assessment has not yet been made regarding the achievement of the applicable performance goals. Any such holdings will be reported on Form 4 within two business days of the date such assessment is made.

F4: Represents a stock option granted on September 16, 2004, granting the Reporting Person the right to purchase up to 6,500 shares of KLA-Tencor common stock. 1,300 of the shares subject to this stock option vested on the two-year anniversary of the grant date, and 1/48 of the remaining 5,200 shares subject to this stock option vested on the 25-month anniversary of the grant date and each monthly anniversary thereafter until September 16, 2010.