ENTEGRIS INC — Director's Dealing 2012

May 3, 2012

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: ENTEGRIS INC (ENTG)
CIK: 0001101302
Period of Report: 2012-05-02

Reporting Person: Burns Robert Nicholas (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2012-05-02	Common Stock	A	11123	—	Acquired	22929	Direct

Footnotes

F1: These restricted stock units vest in full on the date of the Company's 2013 Annual Meeting of Stockholders.

F2: These shares were awarded on May 2, 2012 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2010 Stock Plan which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.