ENTEGRIS INC — Director's Dealing 2011

Feb 24, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: ENTEGRIS INC (ENTG)
CIK: 0001101302
Period of Report: 2011-02-22

Reporting Person: Blake Lynn Larson (Vice President, Finance, CAO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-02-22	Common Stock	A	7534	—	Acquired	51699	Direct
2011-02-23	Common Stock	S	1303	$8.13	Disposed	50396	Direct
2011-02-23	Common Stock	S	3599	$8.3983	Disposed	46797	Direct
2011-02-24	Common Stock	S	98	$8.35	Disposed	46699	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2011-02-22	Employee Stock Option (Right to Buy)	$8.76	A	19223	Acquired	2018-02-19	Common Stock (19223)	Direct

Footnotes

F1: These shares are restricted stock units with restrictions that lapse over a 4 year period with respect to 25% of these shares per year, starting on February 19, 2012.

F2: This restricted stock unit award was made pursuant to an equity incentive award plan in consideration of services as an employee.

F3: These shares were sold pursuant to a 10b5-1 Trading Plan established by the Reporting Person on February 19, 2011.

F4: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Securities & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $8.10 to $8.76, inclusive. The reporting person undertakes to provide Entegris, Inc. any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

F5: The option vests in 4 equal annual installments on February 19, 2012, February 19, 2013, February 19, 2014 and February 19, 2015.

F6: These options were awarded pursuant to a stock option plan that provides for the award of options in consideration of services as an employee.