ENTEGRIS INC — Director's Dealing 2011

May 4, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: ENTEGRIS INC (ENTG)
CIK: 0001101302
Period of Report: 2011-05-04

Reporting Person: CHRISTMAN DANIEL W (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-05-04	Common Stock	A	11806	—	Acquired	121231	Direct

Footnotes

F1: These shares were awarded, effective May 4, 2011, as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2010 Stock Plan which provides for the award of Restricted Stock Units to independed directors in consideration for services as such.