ENTEGRIS INC — Director's Dealing 2011

Mar 7, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: ENTEGRIS INC (ENTG)
CIK: 0001101302
Period of Report: 2011-03-04

Reporting Person: Blake Lynn Larson (Vice President, Finance, CAO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-03-04	Common Stock	M	24000	$1.13	Acquired	70699	Direct
2011-03-04	Common Stock	S	24000	$8.8574	Disposed	46699	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2011-03-04	Employee Stock Option (Right to Buy)	$1.13	M	24000	Disposed	2016-02-19	Common Stock (24000)	Direct

Footnotes

F1: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Securities & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $8.8400 to $8.8800, inclusive. The reporting person undertakes to provide Entegris, Inc. any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

F2: These options are part of a grant that vest in three equal annual installments. The first and second installments vested on February 19, 2010 and February 19, 2011, respectively. The third installment vests on February 19, 2012.

F3: These options were granted pursuant to an employee stock option plan that provides for the grant of options in consideration of services as an employee.