ENTEGRIS INC — Director's Dealing 2011

May 10, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: ENTEGRIS INC (ENTG)
CIK: 0001101302
Period of Report: 2011-05-04

Reporting Person: Burns Robert Nicholas (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-05-04	Common Stock	A	11806	—	Acquired	11806	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2011-05-04	Common Stock	$8.47	A	15000	Acquired	2014-05-04	Common Stock (15000)	Direct

Footnotes

F1: These shares were awarded, effective May 4, 2011, as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2010 Stock Plan which provides for the award of Restricted Stock Units to independent directors in consideration of services as such.

F2: The option vests in three equal annual installments on May 4, 2012, May 4, 2013 and on May 4, 2014.

F3: These options were awarded pursuant to the Entegris, Inc. 2010 Stock Plan that provides for the award of options in consideration of services as a director.