ENTEGRIS INC — Director's Dealing 2011

May 11, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: ENTEGRIS INC (ENTG)
CIK: 0001101302
Period of Report: 2011-05-09

Reporting Person: Morris Gregory Colburn (Vice President, GM, Field Ops.)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-05-09	Common Stock	M	30000	$1.13	Acquired	105170	Direct
2011-05-09	Common Stock	S	30000	$8.7516	Disposed	75170	Direct
2011-05-10	Common Stock	S	10940	$9.00	Disposed	64230	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2011-05-09	Common Stock	$1.13	M	30000	Disposed	2016-02-19	Common Stock (30000)	Direct

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	16822	Indirect

Footnotes

F1: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Securities & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $8.75 to $8.765, inclusive. The reporting person undertakes to provide Entegris, Inc. any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

F2: The option vests in three equal annual installments on February 19, 2010, February 19, 2011 and February 19, 2012.

F3: These options were granted pursuant to an employee stock option plan that provides for the grant of options in consideration of services as an employee.