ENTEGRIS INC — Director's Dealing 2011

May 26, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: ENTEGRIS INC (ENTG)
CIK: 0001101302
Period of Report: 2011-05-24

Reporting Person: GRAVES GREGORY B (EXEC. V.P. & CFO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-05-24	Common Stock	M	7500	$5.90	Acquired	146188	Direct
2011-05-24	Common Stock	S	7500	$8.4326	Disposed	138688	Direct
2011-05-24	Common Stock	M	25820	$5.40	Acquired	164508	Direct
2011-05-24	Common Stock	S	25820	$8.415	Disposed	138688	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2011-05-24	Employee Stock Option (Right to Buy)	$5.90	M	7500	Disposed	2012-10-15	Common Stock (7500)	Direct
2011-05-24	Employee Stock Option (Right to Buy)	$5.40	M	25820	Disposed	2017-02-19	Common Stock (25820)	Direct

Footnotes

F1: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Securities & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $8.445 to $8.423, inclusive. The reporting person undertakes to provide Entegris, Inc. any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

F2: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Securities & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $8.40 to $8.435, inclusive. The reporting person undertakes to provide Entegris, Inc. any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

F3: This option vests in three equal annual installments on February 19, 2011, February 19, 2012 and February 19, 2013.

F4: These options were awarded pursuant to a stock option plan that provides for the award of options in consideration of services as an employee.