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BLUGLASS LIMITED — AGM Information 2017
Nov 12, 2017
64532_rns_2017-11-12_79306bd9-0258-4bab-a5ff-90748a41e396.pdf
AGM Information
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BLUGLASS LIMITED BLUGLASS LIMITED BLUGLASS LIMITED ANNUAL GENERAL MEETING 2017ANNUAL GENERAL MEETING 2017ANNUAL GENERAL MEETING 2017
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BLUGLASS LIMITED BLUGLASS LIMITED BLUGLASS LIMITED ANNUAL GENERAL MEETING 2017ANNUAL GENERAL MEETING 2017ANNUAL GENERAL MEETING 2017
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OUR VISION
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Creating a brighter future, through the impacts of lower temperature RPCVD
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THE RPCVD BREAKTHROUGH
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RPCVD – Remote Plasma Chemical Vapour Deposition
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BENEFITS
Lower temperature
manufacturing processes
Lower cost inputs
Higher performing
devices
More Environmentally
friendly & sensitive
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INTRODUCING EPIBLU
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PROGRESS TOWARDS COMMERICALISATION
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APPLICATIONS
COLLABORATION PROGRESS
COMMMERCIAL OUTCOMES/ REVENUE
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Blue LEDs
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THE YEAR AHEAD
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Complete industry evaluations
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Select more partners/collaborators
Generate and protect more IP
Achieve commercial outcome
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2017 HIGHLIGHTS
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BluGlass has made significant technical progress in bringing RPCVD towards commercialisation
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SEP 2016 OCT 2016 NOV 2016 DEC 2016 AUG 2017 SEP 2017
Upgraded RPCVD Successful capital raising: Enters into Exclusive Successful capital raising: Upgraded RPCVD Upgraded BLG-300
system (BLG-180) $5M Placement Collaboration with global $3.1M SPP system BLG-300 comes meets performance and
comes online Foundry online thickness uniformity
Leader, IQE targets
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OCT 2016 NOV 2016 NOV 2016 JUN 2017 SEP 2017 NOV 2017 Lumileds & BluGlass William Johnson Enters unique Presents latest RPCVD Enter Phase II appointed NonBluGlass receives $600K James Walker joins the partnership with Griffith data at invitational of Exclusive Executive Chairman Foundry Order from New BluGlass Board as NonUni & IMCRC to create nitrides conference and Collaboration Customer Executive Director next generation power files new patent electronics application
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IP PORTFOLIO
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Hardware & Process Patents
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47
18 6
GRANTED PATENTS
in key markets; PATENT PATENT
China, Japan, USA APPLICATIONS FAMILIES
& Europe
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FINANCIAL PERFORMANCE
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CURRENT POSITION
FORECAST POSITION
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$8.1M $480K $550K $2.1M
$9.09M
RAISED IN BURN RATE/MONTH CUSTOM EPITAXY (FOUNDRY) ANTICIPATED R&D
CASH POSITION
PLACEMENT & SPP DURING UP BY 5.2% FROM $435K REVENUE FOR 2017 (UP 72% TAX REBATE TO BE RECEIVED IN
AT 30 SEP 2017
CALENDAR YEAR 2016 MONTH IN 2016 FROM 2016) 2017
(Increased Staff)
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BluGlass has a robust cash position to deliver initial commercialisation outcomes
2.5YRS CASH RUNWAY
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LUMILEDS COLLABORATION - PHASE II PROGRESS
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Exclusive collaboration agreement with market leader—device manufacturer
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RPCVD EVALUATION STATUS Collaboration is focused Phase I Complete on a novel application of RPCVD for LEDs Phase II progressing well
PARTNERSHIP WITH WORLD LEADING LED COMPANY TO DEVELOP NOVEL LED APPLICATIONS
Phase II is working to integrate BluGlass’ RPCVD technology into certain Lumileds LED applications
Lumileds and BluGlass are both pleased with the progress of Phase II and are confident in the project achievement
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IQE COLLABORATION
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Strategic Partnership with world leading foundry manufacturer of advanced semiconductor wafer products to the global semiconductor industry
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Exclusive Collaboration Agreement to co-develop nitride films for a range of electronic devices on both silicon and IQE's cREO™ technology using BluGlass’ unique low temperature RPCVD technology
PARTNERSHIP WITH WORLD LEADING FOUNDRY TO DEVELOP A RANGE OF ELECTRONIC APPLICATIONS
IQE products are used by major global chip companies to produce the high performance components that enable a wide range of high-tech applications including for the wireless industry
Positive collaboration is ongoing and both companies remain committed to achieving the technology goals
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VEECO & HC SEMITEK EVALUATIONS – RECENTLY RECOMMENCED
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RPCVD EVALUATION WITH WORLDS LARGEST MOCVD EQUIPMENT MANUFACTURER
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RPCVD EVALUATION
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STATUS
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Positive initial 2 inch trials for green LEDs Recently upgraded BLG-300 with LED Power uniformity over 4 & 6“ wafers has Electronics enabled this evaluation to recommence
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LEADING CHINESE LED COMPANY EXPLORING RPCVD FOR MULTIPLE APPLICATIONS
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RPCVD EVALUATION STATUS
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Targeting enhanced performance and lower cost LEDs using RPCVD Recently upgraded BLG-300 with uniformity over 4 & 6“ wafers has enabled this evaluation to recommence
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LED
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EPIBLU – CUSTOM EPITAXY SERVICE BUSINESS
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Multiple customers
Growing pipeline of new customers Providing both MOCVD & RPCVD services Conducting services for green and blue LEDs, power electronics, and laser diodes
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END MARKETS LED
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10.4%
The LED market is expected to experience CAGR of 10.4% through to 2025
$63.2B LED revenues are expected to reach $63.2 billion by 2025
Source: Research and Markets Report Global Light-Emitting Diodes (LED) Market Analysis & Trends - Industry Forecast to 2025 ; and Navigant Research
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END MARKETS POWER ELECTRONICS
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The Power Electronics markets also presents a growing opportunity for the RPCVD technology
$2.6B The GaN and SiC power electronics market is expected to be worth $2.6B by 2022
GaN for power semiconductors is expected to grow at ~90% CAGR to 2022
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Source: Stifel, Sep 2017; and Research and Markets
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PATH TO MARKET
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BluGlass continues to be active in all four segments of its path to market
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CONCLUSION INVESTMENT HIGHLIGHTS
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LED,
Power & Sales from
Services
Solar
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Disruptive Multiple, Well funded, platform growing end approaching technology markets commercialisation
High end A team with global Multiple service leading expertise in awards & capability semiconductors grants
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LUMILEDS PHASE II AND OTHER INDUSTRY COLLABORATIONS
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Lumileds pleased with progress and are committed to project
A number of iterations of BluGlass wafers have been fabricated at Lumileds
Both RPCVD systems with the latest chamber design are delivering on technical roadmap for Lumileds project
HC Semitek, IQE, and Veeco collaborations are all recommencing with the success of the upgraded BLG-300 RPCVD capability BluGlass has filed a patent
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BLG-300 RPCVD CHAMBER UPGRADE – THICKNESS UNIFORMITY IMPROVEMENT
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| 19x2” 19x2” inner ring 19x2” outer ring 5x4” 2x6” WAFER DIAMETER 2” (OUTER) 2” (INNER) 100 mm 150 mm 2017 CHAMBER (THICKNESS STD DEV %) 1.1 3.3 2.6 3.4 2016 CHAMBER (THICKNESS STD DEV %) 6.8 7.8 10.9 -- |
19x2” 19x2” inner ring 19x2” outer ring 5x4” 2x6” WAFER DIAMETER 2” (OUTER) 2” (INNER) 100 mm 150 mm 2017 CHAMBER (THICKNESS STD DEV %) 1.1 3.3 2.6 3.4 2016 CHAMBER (THICKNESS STD DEV %) 6.8 7.8 10.9 -- |
19x2” 19x2” inner ring 19x2” outer ring 5x4” 2x6” WAFER DIAMETER 2” (OUTER) 2” (INNER) 100 mm 150 mm 2017 CHAMBER (THICKNESS STD DEV %) 1.1 3.3 2.6 3.4 2016 CHAMBER (THICKNESS STD DEV %) 6.8 7.8 10.9 -- |
19x2” 19x2” inner ring 19x2” outer ring 5x4” 2x6” WAFER DIAMETER 2” (OUTER) 2” (INNER) 100 mm 150 mm 2017 CHAMBER (THICKNESS STD DEV %) 1.1 3.3 2.6 3.4 2016 CHAMBER (THICKNESS STD DEV %) 6.8 7.8 10.9 -- |
19x2” 19x2” inner ring 19x2” outer ring 5x4” 2x6” WAFER DIAMETER 2” (OUTER) 2” (INNER) 100 mm 150 mm 2017 CHAMBER (THICKNESS STD DEV %) 1.1 3.3 2.6 3.4 2016 CHAMBER (THICKNESS STD DEV %) 6.8 7.8 10.9 -- |
|---|---|---|---|---|
| WAFER DIAMETER | 2” (OUTER) | 2” (INNER) | 100 mm | 150 mm |
| 2017 CHAMBER (THICKNESS STD DEV %) | 1.1 | 3.3 | 2.6 | 3.4 |
| 2016 CHAMBER (THICKNESS STD DEV %) | 6.8 | 7.8 | 10.9 | -- |
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BLUGLASS CUSTOM EPITAXIAL SERVICES
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Targeting strategic customers requiring both RPCVD and MOCVD combined
BluGlass has repeat customers developing applications in both LEDs and Laser Diodes
BluGlass has enhanced several demonstrators using our in-house RPCVD and MOCVD capabilities to market to the industry
Recently showcased several Key Demonstrators at the recent semiconductor conference
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RPCVD TECHNOLOGY DEVELOPMENT AREAS
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RPCVD p-GaN FOR E-MODE HEMTs – COLLABORATION WITH VEECO
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RPCVD VS. MOCVD p-GaN:
Mg DIFFUSION IN HEMTs
p-GaN (GaN:Mg) RPCVD
Regrowth interface
3 nm GaN cap
Al0.23Ga0.77N Barrier Commercial
GaN Channel 150mm
HEMT on
C-GaN
Si<111>
Graded AlxGax-1N wafer
AlN layer (MOCVD)
MOCVD
150 mm Si<111>
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Note the Mg SIMS trace for the MOCVD growth is overlayed on the RPCVD p-GaN on HEMT SIMS trace for ease of comparison. The Al traces from the 2DEG (common to both structures) was used for alignment purposes.
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KEY DEMONSTRATOR: RPCVD p-GaN + MOCVD FOR GREEN LEDs
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LED STRUCTURE GROWN
USING MOCVD
p-GaN GROWN USING RPCVD
p-GaN grown at INTERMEDIATE to HIGH temperature Multi-Quantum-Well (MQW) InGaN layer, the ACTIVE REGION of an LED – grown at low temperature
p-GaN grown at LOW temperature Multi-Quantum-Well (MQW) InGaN layer, the ACTIVE REGION of an LED – grown at low temperature
n-GaN grown at high temperature GaN grown at high temperature Sapphire Substrate
n-GaN grown at high temperature GaN grown at high temperature Sapphire Substrate
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KEY DEMONSTRATOR: RPCVD p-GaN + MOCVD FOR GREEN LEDs
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1.3 3.5 525 35 1.6 3.9 525 33
| ** | |||
|---|---|---|---|
| 1.3 | 3.3 | 6.2 | |
| 3.1 | 3.7 | 4.6 | |
| 514 | 511 | 508 | |
| 28 | 31 | 33 |
| 1.9 | 4.5 | 8.1 |
|---|---|---|
| 3.0 | 3.6 | 4.5 |
| 515 | 512 | 510 |
| 30 | 30 | 33 |
- MOCVD data from best results for complete LED structure grown without any interruption and using a p-AlGaN EBL. RPCVD data taken from best results overgrown on equivalent MOCVD-grown MQWs. RPCVD samples do not contain an EBL. All measurements taken at wafer level using indium dot contacts.
** Both RPCVD and MOCVD data obtained from p-GaN overgrown on the same partial LEDs grown by MOCVD up to and including the EBL. All measurements taken at wafer level using indium dot contacts.
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KEY DEMONSTRATOR: RPCVD p-GaN + RPCVD MQWs FOR RGB LEDs
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LED STRUCTURE GROWN USING MOCVD
p-GaN & MQW GROWN USING RPCVD
p-GaN grown at INTERMEDIATE to HIGH temperature
p-GaN grown at LOW temperature
Multi-Quantum-Well (MQW) InGaN layer, the ACTIVE REGION of an LED – grown at low temperature
n-GaN grown at high temperature
GaN grown at high temperature
Sapphire Substrate
Multi-Quantum-Well (MQW) InGaN layer, the ACTIVE REGION of an LED – grown at low temperature
n-GaN grown at high temperature GaN grown at high temperature Sapphire Substrate
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KEY DEMONSTRATOR: RPCVD MQWs for RGB LEDs
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RPCVD MQW BASED LED 2016
RPCVD MQW BASED LEDs 2017
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To attract further industry interest BluGlass continues to enhance the RPCVD capability
Low temperature RPCVD is favourable for In rich InGaN MQWs useful for longer wavelength LEDs
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Micro-LED players have shown interest
At 100 mA: in RPCVD capability for blue, green,
yellow and red LEDs for display and
Vf = 4.4 V other applications
= 451 nm
FW = 31 nm
LOP = 0.6 mW
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KEY DEMONSTRATOR: RGB RPCVD FOR MICRO-LEDS AND SOLAR APPLICATIONS
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EL SPECTRA OF LEDs GROWN USING RPCVD MQWS
Preliminary RPCVD demonstration of RGB LED capability
RPCVD MQW capability is also a key step to the realisation of high efficiency solar cells through multi junction architecture
Wavelength (nm)
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THANK
YOU
bluglass.com.au
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