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AXCELIS TECHNOLOGIES INC Director's Dealing 2026

Jan 16, 2026

31374_dirs_2026-01-16_0c0a65f4-81b3-45bb-8956-c318a3bccce2.zip

Director's Dealing

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SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2026-01-15

Reporting Person: Mahoney Robert John (N/A)

Non-Derivative Transactions

Date Security Code Shares Price A/D Holdings After Ownership
2026-01-15 Common Stock A 1734 Acquired 15206 Direct

Footnotes

F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on January 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of January 15, 2027, January 15, 2028, January 15, 2029, and January 15, 2030.

F2: Of the shares held after this grant on January 15, 2026, 11,611 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.