AXCELIS TECHNOLOGIES INC — Director's Dealing 2024

May 15, 2024

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2024-05-15

Reporting Person: GRAVES GREGORY B (N/A)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2024-05-15	Common Stock	A	1162	—	Acquired	3172	Direct

Footnotes

F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2025.

F2: Of the shares held as of May 15, 2024, all were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.