AXCELIS TECHNOLOGIES INC — Director's Dealing 2023

May 17, 2023

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2023-05-15

Reporting Person: PUMA MARY G (Director, Executive Chairperson)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2023-05-15	Common Stock	A	12018	$0.00	Acquired	344430	Direct
2023-05-15	Common Stock	F	5050	$127.99	Disposed	339380	Direct
2023-05-15	Common Stock	F	4832	$127.99	Disposed	334548	Direct

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	5000	Indirect

Footnotes

F1: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment, 100% of the earned shares will vest on February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2024.

F2: Of the shares held after the grant on May 15, 2023, 102,239 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F3: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4: Represents the closing price of the common stock on the date of the tax withholding.

F5: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2023, 90,853 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F6: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2023, 79,958 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.