AXCELIS TECHNOLOGIES INC — Director's Dealing 2023

May 18, 2023

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2023-05-16

Reporting Person: Lawson Douglas A. (EVP, Corporate Mktg & Strategy)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2023-05-16	Common Stock	F	536	$129.92	Disposed	25314	Direct
2023-05-17	Common Stock	F	744	$137.69	Disposed	24570	Direct
2023-05-18	Common Stock	S	4703	$141.05	Disposed	19867	Direct

Footnotes

F1: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F2: Represents the closing price of the common stock on the date of the tax withholding.

F3: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 17,514 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F4: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2023, 15,838 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F5: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.00 to $141.36, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F6: Of the shares held after this sale on May 18, 2023, 15,838 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.