AXCELIS TECHNOLOGIES INC — Director's Dealing 2023

May 18, 2023

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2023-05-16

Reporting Person: PUMA MARY G (Director, Executive Chairperson)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2023-05-16	Common Stock	F	2330	$129.92	Disposed	332218	Direct
2023-05-17	Common Stock	F	2332	$137.69	Disposed	328986	Direct
2023-05-18	Common Stock	S	8578	$141.52	Disposed	320408	Direct
2023-05-18	Common Stock	G	4778	$0.00	Disposed	315630	Direct

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	5000	Indirect

Footnotes

F1: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F2: Represents the closing price of the common stock on the date of the tax withholding.

F3: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 74,706 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F4: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F5: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.45 to $141.60, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F6: Of the shares held after this sale on May 18, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F7: These shares of Common Stock were donated by the reporting person as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF.

F8: Of the shares held after this gift on May 18, 2023, 67,420 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.