AXCELIS TECHNOLOGIES INC — Director's Dealing 2021

Aug 30, 2021

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2021-08-30

Reporting Person: Low Russell (EVP, Engineering)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2021-08-30	Common Stock	M	5475	$14.00	Acquired	74636	Direct
2021-08-30	Common Stock	S	3305	$50.63	Disposed	71331	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2021-08-30	Stock option (right to buy)	$14.00	M	5475	Disposed	2023-11-15	Common Stock (5475)	Direct

Footnotes

F1: Of the shares beneficially owned by the executive on August 30, 2021, 40,711 shares were issuable on vesting of restricted stock units which are subject to forfeiture.