AXCELIS TECHNOLOGIES INC — Director's Dealing 2017

May 12, 2017

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2017-05-09

Reporting Person: PUMA MARY G (Director, President and CEO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2017-05-09	Common Stock	M	46598	$2.80	Acquired	240684	Direct
2017-05-09	Common Stock	S	46598	$21.09	Disposed	194086	Direct
2017-05-10	Common Stock	M	15902	$2.80	Acquired	209988	Direct
2017-05-10	Common Stock	M	62500	$3.72	Acquired	272488	Direct
2017-05-10	Common Stock	S	78402	$21.05	Disposed	194086	Direct
2017-05-11	Common Stock	M	62500	$4.64	Acquired	256686	Direct
2017-05-11	Common Stock	S	62500	$21.01	Disposed	194086	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2017-05-09	Stock Option (right to buy)	$2.80	M	46598	Disposed	2018-11-17	Common Stock (46598)	Direct
2017-05-10	Stock option (right to buy)	$2.80	M	15902	Disposed	2018-11-17	Common Stock (15902)	Direct
2017-05-10	Stock option (right to buy)	$3.72	M	62500	Disposed	2019-07-16	Common Stock (62500)	Direct
2017-05-11	Stock option (right to buy)	$4.64	M	62500	Disposed	2019-11-16	Common Stock (62500)	Direct

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	5000	Indirect

Footnotes

F1: Of the shares held as of May 9, 10 and 11, 2017, 75,000 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

F2: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $21.00 to $21.45, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price.

F3: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $21.00 to $21.40, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price.

F4: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $21.00 to $21.10, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price.