AXCELIS TECHNOLOGIES INC — Director's Dealing 2017

Feb 8, 2017

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2017-02-06

Reporting Person: BREWER KEVIN J (EVP & Chief Financial Officer)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2017-02-06	Common Stock	M	18478	$3.72	Acquired	80114	Direct
2017-02-06	Common Stock	M	31250	$4.64	Acquired	111364	Direct
2017-02-06	Common Stock	S	4500	$16.80	Disposed	106864	Direct
2017-02-06	Common Stock	S	300	$16.75	Disposed	106564	Direct
2017-02-06	Common Stock	S	300	$16.70	Disposed	106264	Direct
2017-02-06	Common Stock	S	600	$16.65	Disposed	105664	Direct
2017-02-06	Common Stock	S	500	$16.60	Disposed	105164	Direct
2017-02-06	Common Stock	S	1750	$16.55	Disposed	103414	Direct
2017-02-06	Common Stock	S	18066	$16.50	Disposed	85348	Direct
2017-02-06	Common Stock	S	1600	$16.53	Disposed	83748	Direct
2017-02-06	Common Stock	S	100	$16.43	Disposed	83648	Direct
2017-02-06	Common Stock	S	19812	$16.40	Disposed	63836	Direct
2017-02-06	Common Stock	S	2200	$16.45	Disposed	61636	Direct
2017-02-07	Common Stock	M	146	$3.72	Acquired	61782	Direct
2017-02-07	Common Stock	S	146	$16.50	Disposed	61636	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2017-02-06	Stock Option (right to buy)	$3.72	M	18478	Acquired	2019-07-16	Common Stock (18478)	Direct
2017-02-06	Stock option (right to buy)	$4.64	M	31250	Acquired	2019-11-16	Common Stock (31250)	Direct
2017-02-06	Stock option (right to buy)	$3.72	M	146	Acquired	2019-07-16	Common Stock (146)	Direct

Footnotes

F1: Of the shares held as of February 6, 2017 and February 7, 2017, 40,000 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.