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AXCELIS TECHNOLOGIES INC Director's Dealing 2016

Nov 16, 2016

31374_dirs_2016-11-16_fc922e44-f791-42e9-b9b0-190bf857ef65.zip

Director's Dealing

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SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2016-11-15

Reporting Person: Low Russell (EVP, Engineering)

Non-Derivative Transactions

Date Security Code Shares Price A/D Holdings After Ownership
2016-11-15 Common Stock A 10949 $0.00 Acquired 10949 Direct

Derivative Transactions

Date Security Exercise Price Code Shares A/D Expiration Underlying Ownership
2016-11-15 Stock Option (right to buy) $14.00 A 21898 Acquired 2023-11-15 Common Stock (21898) Direct

Footnotes

F1: Granted pursuant to the Axcelis Technologies, Inc. 2012 Equity Incentive Plan.

F2: These share are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service as a director, 25% of these restricted stock units will vest on each of November 15, 2017, November 15, 2018, November 15, 2019 and November 15, 2020.

F3: These options will vest as to 25% of the shares on each of November 15, 2017, November 15, 2018, November 15, 2019 and November 15, 2020, if the officer remains in the service of the Company on such vesting date.