AXCELIS TECHNOLOGIES INC — Director's Dealing 2015

Feb 19, 2015

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2015-02-17

Reporting Person: Lawson Douglas A. (EVP, Corporate Mktg & Strategy)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2015-02-17	Common Stock	M	7088	$1.60	Acquired	22186	Direct
2015-02-17	Common Stock	M	18750	$1.99	Acquired	40936	Direct
2015-02-17	Common Stock	S	3188	$2.80	Disposed	37748	Direct
2015-02-17	Common Stock	S	3900	$2.81	Disposed	33848	Direct
2015-02-17	Common Stock	S	15250	$2.76	Disposed	18598	Direct
2015-02-18	Common Stock	M	57912	$1.60	Acquired	76510	Direct
2015-02-18	Common Stock	S	21687	$2.70	Disposed	54823	Direct
2015-02-18	Common Stock	S	6700	$2.72	Disposed	48123	Direct
2015-02-18	Common Stock	S	11504	$2.73	Disposed	36619	Direct
2015-02-18	Common Stock	S	13596	$2.74	Disposed	23023	Direct
2015-02-18	Common Stock	S	1825	$2.75	Disposed	21198	Direct
2015-02-18	Common Stock	S	2500	$2.76	Disposed	18698	Direct
2015-02-18	Common Stock	S	100	$2.77	Disposed	18598	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2015-02-17	Stock Option (right to buy)	$1.60	M	7088	Disposed	2020-07-15	Common Stock (7088)	Direct
2015-02-17	Stock Option (right to buy)	$1.99	M	18750	Disposed	2020-07-15	Common Stock (18750)	Direct
2015-02-18	Stock Option (right to buy)	$1.60	M	57912	Disposed	2020-07-15	Common Stock (57912)	Direct

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	12500	Indirect

Footnotes

F1: These options are from an original grant of 75,000 shares, of which 25% were vested on 7/15/2014, and 25% will vest on each of 7/15/2015, 7/15/2016 and 7/15/2017.