AXCELIS TECHNOLOGIES INC — Director's Dealing 2015

May 15, 2015

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2015-05-14

Reporting Person: FALLON LYNNETTE C (Executive VP, HR/Legal)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2015-05-14	Common Stock	M	125000	$0.70	Acquired	211287	Direct
2015-05-14	Common Stock	S	21600	$3.12	Disposed	189687	Direct
2015-05-14	Common Stock	S	32321	$3.13	Disposed	157366	Direct
2015-05-14	Common Stock	S	19101	$3.14	Disposed	138265	Direct
2015-05-14	Common Stock	S	29339	$3.15	Disposed	108926	Direct
2015-05-14	Common Stock	S	21939	$3.16	Disposed	86987	Direct
2015-05-14	Common Stock	S	700	$3.17	Disposed	86287	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2015-05-14	Stock Option (right to buy)	$0.70	M	125000	Disposed	2018-11-17	Common Stock (125000)	Direct