AXCELIS TECHNOLOGIES INC — Director's Dealing 2015

May 18, 2015

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2015-05-15

Reporting Person: St Dennis Thomas (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2015-05-15	Common Stock	A	45000	$0.00	Acquired	45000	Direct

Footnotes

F1: These share are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service as a director, 25% of these restricted stock units will vest on each of May 15, 2016, May 15, 2017, May 15, 2018 and May 15, 2019.

F2: Of the shares held as of May 15, 2015, 45,000 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forefeiture.