AXCELIS TECHNOLOGIES INC — Director's Dealing 2015

Jul 16, 2015

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2015-07-15

Reporting Person: NETTLES PATRICK H (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2015-07-15	Common Stock	A	16000	$0.00	Acquired	79685	Direct

Footnotes

F1: Granted pursuant to the Axcelis Technologies, Inc. 2012 Equity Incentive Plan.

F2: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service as a director, these restricted stock units will vest and the shares will be issued on January 12, 2016.

F3: Of the shares held as of July 15, 2015, 16,000 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.