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AXCELIS TECHNOLOGIES INC Director's Dealing 2014

Jan 29, 2014

31374_dirs_2014-01-29_796ef6de-4065-4c2a-b61f-953627b096ec.zip

Director's Dealing

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SEC Form 4/A — Form 4/A

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2013-02-12

Reporting Person: BREWER KEVIN J (EVP, Global Operations)

Holdings (Non-Derivative)

Security Shares Ownership
Common Stock 81546 Direct

Footnotes

F1: Mr. Brewer's holdings of common stock have been reduced by 1 share to correct a record keeping error in the number of shares withheld for taxes on previous Restricted Stock Unit vesting events.