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AXCELIS TECHNOLOGIES INC Director's Dealing 2014

Jan 29, 2014

31374_dirs_2014-01-29_97234074-61e3-4573-aa61-040d79150d08.zip

Director's Dealing

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SEC Form 4/A — Form 4/A

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2013-12-17

Reporting Person: PUMA MARY G (Director, Chairman, President and CEO)

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	396224	Direct
Common Stock	20000	Indirect

Footnotes

F1: Ms. Puma's holdings of common stock have been reduced by 3 shares to correct a record keeping error in the number of shares withheld for taxes on previous Restricted Stock Unit vesting events.