AXCELIS TECHNOLOGIES INC — Director's Dealing 2014

Feb 18, 2014

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2014-02-14

Reporting Person: Bintz William J (EVP, Engineering and Marketing)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2014-02-14	Common Stock	M	90000	$0.70	Acquired	164719	Direct
2014-02-14	Common Stock	S	20734	$2.14	Disposed	143985	Direct
2014-02-14	Common Stock	S	62453	$2.15	Disposed	81532	Direct
2014-02-14	Common Stock	S	6813	$2.16	Disposed	74719	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2014-02-10	Stock option (to buy)	$0.70	M	90000	Disposed	2018-11-17	Common Stock (90000)	Direct