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AXCELIS TECHNOLOGIES INC Director's Dealing 2014

May 12, 2014

31374_dirs_2014-05-12_d61cf926-9caa-4de8-9ac9-d58d497f7f0b.zip

Director's Dealing

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SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2014-05-09

Reporting Person: Lawson Douglas A. (EVP, Corporate Mktg & Strategy)

Non-Derivative Transactions

Date Security Code Shares Price A/D Holdings After Ownership
2014-05-09 Common Stock P 528 $1.58 Disposed 10626 Direct
2014-05-09 Common Stock P 4472 $1.59 Disposed 15098 Direct
2014-05-09 Common Stock P 5000 $1.59 Disposed 12500 Indirect