AXCELIS TECHNOLOGIES INC — Director's Dealing 2014

Jul 18, 2014

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2014-07-15

Reporting Person: PUMA MARY G (Director, Chairman, President and CEO)

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2014-07-15	Stock option (right to buy)	$1.80	A	300000	Acquired	2021-07-15	Common Stock (300000)	Direct

Footnotes

F1: Granted pursuant to the Axcelis Technologies, Inc. 2012 Equity Incentive Plan.

F2: These options will vest as to 25% of the shares on each of July 15, 2015, July 15, 2016, July 15, 2017 and July 15, 2018, if the officer remains in the service of the Company on such vesting date.