AXCELIS TECHNOLOGIES INC — Director's Dealing 2014

Nov 19, 2014

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2014-11-18

Reporting Person: Lawson Douglas A. (EVP, Corporate Mktg & Strategy)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2014-11-18	Common Stock	M	24748	$1.60	Acquired	39846	Direct
2014-11-18	Common Stock	S	24748	$2.19	Disposed	15098	Direct
2014-11-19	Common Stock	M	5252	$1.60	Acquired	20350	Direct
2014-11-19	Common Stock	M	12500	$1.59	Acquired	32850	Direct
2014-11-19	Common Stock	M	12500	$0.93	Acquired	45350	Direct
2014-11-19	Common Stock	S	30252	$2.13	Disposed	15098	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2014-11-18	Non-qualified stock option (right to buy)	$1.60	M	24748	Acquired	2021-07-15	Common Stock (24748)	Direct
2014-11-19	Non-qualified stock option (right to buy)	$1.60	M	5252	Acquired	2021-07-15	Common Stock (5252)	Direct
2014-11-19	Non-qualified stock option (right to buy)	$1.59	M	12500	Acquired	2020-01-15	Common Stock (12500)	Direct
2014-11-19	Non-qualified stock option (right to buy)	$0.93	M	12500	Acquired	2019-07-15	Common Stock (12500)	Direct

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	12500	Indirect

Footnotes

F1: These options became excercisable as to 10,0000 shares on each of 7/15/2012, 7/15/2013 and 7/15/2014, and will become exercisable as to the remaining 10,000 shares on 7/15/2015, assuming continuation of employment.

F2: These options became excercisable as to 10,0000 shares on each of 7/15/2012, 7/15/2013 and 7/15/2014, and will become exercisable as to the remaining 10,000 shares on 7/15/2015, assuming continuation of employment.

F3: These options became excercisable as to 12,500 shares on each of 7/15/2013 and 7/15/2014, and will become exercisable as to 12,500 shares on each of 7/15/2015 and 7/15/2016, assuming continuation of employment.