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AXCELIS TECHNOLOGIES INC Director's Dealing 2013

Jan 16, 2013

31374_dirs_2013-01-16_7fd358ab-3c15-4710-9997-3e6398d2a7e2.zip

Director's Dealing

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SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2013-01-15

Reporting Person: PUMA MARY G (Director, Chairman, President and CEO)

Non-Derivative Transactions

Date Security Code Shares Price A/D Holdings After Ownership
2013-01-15 Common Stock A 147637 Acquired 448089 Direct

Holdings (Non-Derivative)

Security Shares Ownership
Common Stock 20000 Indirect

Footnotes

F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan, in lieu of base pay otherwise due to the executive in 2013. Assuming continuation of employment, 25% of these restricted stock units will vest on March 15, 2013, June 15, 2013, September 15, 2013 and December 15, 2013.

F2: Of the shares held as of January 15, 2013, 147,637 were issuable on vesting of restricted stock units granted the executive under the 20012 Equity Incentive Plan and are subject to forfeiture.