AXCELIS TECHNOLOGIES INC — Director's Dealing 2013

Jan 22, 2013

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2013-01-18

Reporting Person: ZAGER JAY (CFO and EVP)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2013-01-18	Common Stock	F	4743	$1.27	Disposed	178035	Direct

Footnotes

F1: Shares withheld by the Company equal to tax liability of the executive officer incident to the vesting of restricted stock units issued in accordance with Rule 16b-3.

F2: Represents the closing price of the common stock on January 18, 2013.

F3: Of the shares held as of January 18, 2013, 152,272 were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements.