AXCELIS TECHNOLOGIES INC — Director's Dealing 2013

Feb 13, 2013

SEC Form 3 — Initial Statement of Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2013-02-13

Reporting Person: ALDEBORGH JOHN E (EVP, Customer Operations)

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	0	Direct

Holdings (Derivative)

Security	Exercise Price	Expiration	Underlying	Shares	Ownership
Stock option (right to buy)	$1.27	2020-01-15	Common Stock (200000)		Direct

Footnotes

F1: To become exercisable as to 25% of the shares granted on each of 1/15/2014, 1/15/2015, 1/15/2016 and 1/15/2017.