AXCELIS TECHNOLOGIES INC — Director's Dealing 2013

Mar 19, 2013

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2013-03-18

Reporting Person: Bintz William J (EVP, Prod. Dev., Eng. & Mktg)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2013-03-18	Common Stock	S	3823	$1.21	Disposed	84286	Direct

Footnotes

F1: This sale is pursuant to a prior election by the executive officer to sell shares issued on the vesting of restricted stock units in order to generate funds to pay to the Company to cover the executive's tax liability arising from the vesting event. The proceeds of this sale will be paid to the Company.

F2: Of the shares held as of March 18, 2013, 28,347 were issuable on vesting of restricted stock units granted the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.