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AXCELIS TECHNOLOGIES INC Director's Dealing 2013

Nov 14, 2013

31374_dirs_2013-11-14_efeac641-ea4f-49fe-b8e3-d32f96b51ac7.zip

Director's Dealing

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SEC Form 3 — Initial Statement of Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2013-11-13

Reporting Person: Lawson Douglas A. (EVP, Corporate Mktg & Strategy)

Holdings (Non-Derivative)

Security Shares Ownership
Common Stock 10098 Direct
Common Stock 7500 Indirect

Holdings (Derivative)

Security Exercise Price Expiration Underlying Shares Ownership
Stock option (right to buy) $1.59 2020-01-15 Common Stock (12500) Direct
Stock option (right to buy) $1.60 2020-07-15 Common Stock (65000) Direct
Stock option (right to buy) $1.60 2021-07-15 Common Stock (40000) Direct
Stock option (right to buy) $0.93 2019-07-16 Common Stock (37500) Direct
Stock option (right to buy) $1.99 2020-07-15 Common Stock (75000) Direct

Footnotes

F1: Granted pursuant to the Axcelis Technologies, Inc. 2000 Stock Plan.

F2: To become exercisable on 1/15/2014.

F3: Exercisable as to 46,250 shares and to become exercisable as to an additional 18,750 on 7/15/2014.

F4: Excercisable as to 20,000 shares and to become exercisable as to an additional 10,000 shares on each of 7/15/2014 and 7/15/2015.

F5: Granted pursuant to the Axcelis Technologies, Inc. 2012 Equity Incentive Plan.

F6: To become exercisable as to 12,500 shares on each of 7/16/2014, 7/16/2015 and 7/16/2016.

F7: To become exercisable as to 18,750 shares on each of 7/15/2014, 7/15/2015, 7/15/2016 and 7/15/2017.