AXCELIS TECHNOLOGIES INC — Director's Dealing 2013

Dec 17, 2013

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2013-12-17

Reporting Person: PUMA MARY G (Director, Chairman, President and CEO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2013-12-17	Common Stock	S	7922	$2.16	Disposed	400855	Direct
2013-12-17	Common Stock	S	4528	$2.17	Disposed	396327	Direct
2013-12-17	Common Stock	S	100	$2.175	Disposed	396227	Direct

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	20000	Indirect

Footnotes

F1: The sales reported on this Form are pursuant to a prior election by the executive officer to sell shares issued on the vesting of restricted stock units in order to generate funds to pay to the Company to cover the executive's tax liability arising from the vesting event and related commissions. The proceeds of this sale will be paid to the Company and the broker.